DL81/DL82
Delivering the ultimate in processing innovations, the DL series is Logitech’s newest, highly automated, and intelligent sample preparation system. Featuring dynamic load control with Logitech’s intelligent air jigs, the system ensures fast, reliable, and highly accurate results across a wide range of materials used in semiconductor wafer processing, from soft, friable materials like Indium Phosphide (InP) and Gallium Arsenide (GaAs) to very hard materials such as Silicon Carbide (SiC) and Diamond.
Description
The advanced automation significantly reduces setup and cleanup time, while the integrated software offers a user-friendly platform for precise, controlled processing. Logitech’s intelligent air-driven jigs utilize air pressure to apply up to 40kg of downforce on the chuck, achieving rotational speeds of up to 100 rpm, ensuring optimal sample load application. This enables high geometric accuracy, consistent sample rotation, and excellent wafer uniformity, resulting in repeatable, high-quality results throughout the process.
Specifications
| Jig Capacity DL81 | 1 x Air Jig - up to 8"/200 mm capacity |
| Jig Capacity DL82 | 2 x Air Jigs simultaneously - each up to 8"/200 mm capacity |
| Jig Options | AJ200 - 8"/200 mm | AJ150 - 6"/150 mm | AJ100 - 4"/100 mm |
| Jig Speed | 100 rpm |
| Height | 1975 mm |
| Jig Load Range | 2 - 40 kg |
| Width | 1639 mm |
| Depth | 1141 mm |
| Power Supply | Single Phase, Earth ac. 220-240V 32 Amps |
| Plate Diameter | Up to 700 mm |
| Plate Speed | 100 rpm |
| Plate Direction | CCW |
| Slurry Flow Rate | 5-100 ml/per minute |
| Wafer Sizes | 2”, 3”, 4”, 6” and 8” single |
| Exhaust Port | 150 mm OD |
| Slurry Waste | Logiwaste Integrated Sealed System |
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