Equipped with removable cartridge for workflow with SEM/FIB.
The MET double tilt CLS object holder was developed in collaboration with Kyushu University in Japan.
Tilt Value
- Alpha (α) tilt range with JEOL HR pole pieces = ± 20°.
- Beta (β) tilt range with HR pole pieces = ± 20° (± 12° with objective diaphragm inserted).
- High stability for resolution at the atomic scale.
Removable MET/FIB cartridge
- Removable FIB cartridge to be able to prepare several FIB samples for observation with the same CLS object holder. After FIB preparation, re-observation in TEM imaging can be performed without changing the position of the sample.
- Possibility of observation in TEM imaging without reorientation of the position of the sample after the FIB preparation step.
- Ease of cleaning the FIB cartridge with Plasma cleaner.
- Dedicated charging station for FIB/MET workflow.
Compatibility
- Compatible with METs from the manufacturer JEOL.