Heating module for MEB motorized stage.

A reflective and multi-layered heat shield

This heating module is easily integrated into the motorized SEM stage and allows the observation of small samples thanks to its specific features. The module is equipped with an opening on the top cover. Temperature transfer from the module to the MEB board is minimized. A reflective, multi-layer heat shield in the heating module focuses radiation towards the central region where the sample is located.

The sample holder can be adapted with different shapes depending on the need, typically in the shape of a crucible or a central thread. Flat samples can be easily fixed using tungsten clamps.
The design is intended to minimize the electric field that could affect imaging.

The system includes the mechanical interface with the connections suitable for the MEB and also the water circulator for cooling the module.


Temperature controller

The integrated PID (or manual) controller allows you to regulate the ambient temperature up to 300°C. The controller takes into account all the heating parameters and can be used after an initial learning routine.

A continuous heating ramp can be selected to study the sample at a constant heating rate. The controller will take charge of the heating setpoint up to the desired temperature and without oscillations. The manual module is controlled by the user to control the desired temperature.

Integration of the module into the MEB

The heating module is mounted in the SEM as a large sample with a dovetail fixing system. It is possible to tilt the module in the room. The interface suitable for MEB is provided.
It is the user's responsibility to be aware of samples that could melt or liquefy under the effect of temperature.

Heating module

Dimensions of the heating module: 50 x 50 x 42 mm
The heating element incorporates an internal reflection shield, fixed with a minimum contact surface in order to keep the heat flow level with the sample surface.

After one hour of heating, it is recommended to interrupt heating for 15 minutes to preserve the environment of the sample and to protect the detectors from overheating.

There is a version of the heating module compatible with EBSD.
The module is equipped with closed-loop water circulator cooling for long experiments.

Different sample attachment methods are possible such as classic SEM supports, crucibles, etc.

Heating module for MEB up to 800°C.
Supplied with the flange to be installed on a port of the MEB (to be defined with the user the ports available on the MEB).

Module specifications

  • Dimension of the heating module: 50 x 50 x 42 mm
  • Weight: 500 gr.
  • Maximum sample size to clip onto the support (tungsten spring clips): 10 x 10 x 2 mm
  • Maximum heating rate: 5°C/s max.
  • Temperature sensor: NiCr-Ni.
  • Temperature range: Ambient to 800°C.
  • Temperature stability: +/- 1°C.

Controller specifications

  • Dimension: 295 x 320 x 125 mm
  • Weight: 7 kg.
  • Input voltage: 115/230V, AC 50-60Hz.
  • Power consumed: 250W maximum.
  • Heating voltage: 0-30V, DC
  • Heating current: 4.5A
  • Interface: RS 485