Heating module for SEM motorized stage.

Clip-on system for samples up to 30 mm in diameter

This heating module is easily integrated on the motorised stage of the SEM and is equipped with a clamp system to install the sample on the hot surface.

Samples can be up to 30 mm in diameter and the temperature can rise to 300°C. Thermal contact with the sample holder is minimised to protect the sample. This module can be used in ambient air up to a maximum temperature of 300°C.

The sample holder can be adapted to different shapes as required. Flat samples can be fixed easily using tungsten clips. The design is intended to minimise the electric field that could affect imaging.

The system includes a mechanical interface with connections adapted to the SEM.


Temperature controller

The integrated PID (or manual) controller can regulate the ambient temperature up to 300°C. The controller takes into account all the heating parameters and can be used after an initial learning routine.

A continuous heating ramp can be selected to study the sample at a constant heating rate. The controller will take over the heating setpoint up to the required temperature without oscillations. The manual module is user-controlled to the desired temperature.

Integration of the module into the SEM

The heating module is mounted in the SEM as a large sample with a dovetail mounting system. The module can be tilted within the chamber. The appropriate SEM interface is supplied.

Heating module

Heating module dimensions: 100 x 60 x 30 mm
The heating element incorporates an internal reflection shield, fixed with a minimum contact surface to keep the heat flow level with the sample surface.
Different methods of sample attachment are possible.

Heating module for SEM up to 300°C.
Supplied with a flange to be fitted to a port on the SEM (the ports available on the SEM are to be defined with the user).


Module specifications

  • Heating module dimensions: 100 x 60 x 30 mm
  • Weight: 500 g
  • Maximum size of sample to clip onto holder (tungsten spring clips): up to 30 mm Ø.
  • Maximum heating speed: 3°C/s max.
  • Temperature sensor: Pt100 / NiCr-Ni.
  • Temperature range: Ambient to 300°C.
  • Temperature stability: < 0.1°C (Pt100) / 1°C.

Controller specifications

  • Dimensions: 295 x 320 x 125 mm
  • Weight: 7 kg.
  • Input voltage: 115/230V, AC 50-60Hz.
  • Power consumption: 250W maximum.
  • Heating voltage: 0-45V, DC
  • Heating current: 2.5A
  • Interface: RS 485