High-Vacuum Compatible Plasma Radical Source.
The makers of the popular Evactron® remote plasma cleaning device, the Evactron® De-ContaminatorTM, introduce a system that brings their proven carbon contamination removal technology to end users and tool manufacturers in high vacuum environments. Carbon contamination degrades the perfor- mance and quality of many high vacuum analytical tools such as XPS and Auger Spectrometers.
The Evactron® PRS-uTM was specifically developed to address the cleaning challenges present in high vacuum environments.
