{"id":25984685,"date":"2026-08-19T21:57:31","date_gmt":"2026-08-19T19:57:31","guid":{"rendered":"https:\/\/eden-instruments.com\/?page_id=25984685"},"modified":"2026-08-21T18:00:44","modified_gmt":"2026-08-21T16:00:44","slug":"cmp-tribo-chemical-mechanical-polishing-cmp-system","status":"publish","type":"page","link":"https:\/\/eden-instruments.com\/en\/frontend-equipment\/logitech\/cmp-tribo-chemical-mechanical-polishing-cmp-system\/","title":{"rendered":"CMP Tribo Chemical Mechanical Polishing (CMP) System"},"content":{"rendered":"<p>[et_pb_section fb_built=&#8221;1&#8243; _builder_version=&#8221;4.24.3&#8243; _module_preset=&#8221;default&#8221; width=&#8221;100%&#8221; custom_margin=&#8221;0px||0px||false|false&#8221; custom_padding=&#8221;0px||0px||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_row column_structure=&#8221;3_5,2_5&#8243; use_custom_gutter=&#8221;on&#8221; gutter_width=&#8221;4&#8243; make_equal=&#8221;on&#8221; _builder_version=&#8221;4.24.3&#8243; _module_preset=&#8221;default&#8221; width=&#8221;100%&#8221; max_width=&#8221;100%&#8221; custom_margin=&#8221;0px||||false|false&#8221; custom_padding=&#8221;0px||75px||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_column type=&#8221;3_5&#8243; _builder_version=&#8221;4.24.3&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_text _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<h2>CMP Tribo<\/h2>\n<p>[\/et_pb_text][et_pb_divider color=&#8221;#D72B2F&#8221; divider_weight=&#8221;3px&#8221; admin_label=&#8221;S\u00e9parateur&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; width=&#8221;10%&#8221; custom_margin=&#8221;||0px||false|false&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_divider][et_pb_text _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;]<\/p>\n<p>The Logitech CMP Tribo is a bench-top chemical mechanical polishing (CMP) system designed with the research of wafer processes in mind, including their associated wafer, pad and slurry interactions. Primary application areas for the CMP Tribo are in the field of CMP planarization or delayering, with secondary application in the field of Tribological science and research.<\/p>\n<p>[\/et_pb_text][\/et_pb_column][et_pb_column type=&#8221;2_5&#8243; _builder_version=&#8221;4.24.3&#8243; _module_preset=&#8221;default&#8221; custom_css_main_element=&#8221;margin: auto;&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_image src=&#8221;https:\/\/eden-instruments.com\/wp-content\/uploads\/2026\/08\/CMP-Tribo.png&#8221; title_text=&#8221;CMP Tribo&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=&#8221;4.25.0&#8243; _module_preset=&#8221;default&#8221; width=&#8221;100%&#8221; max_width=&#8221;100%&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.24.3&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221;][dipi_advanced_tabs tabs_min_width_tablet=&#8221;&#8221; use_tabs_fullwidth_phone=&#8221;on&#8221; tabs_min_width_phone=&#8221;100%&#8221; tabs_placement_phone=&#8221;column&#8221; navigation_size=&#8221;30&#8243; navigation_padding=&#8221;30&#8243; admin_label=&#8221;T\u00e9l\u00e9chargements&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; header_text_color=&#8221;#430C0D&#8221; header_font_size=&#8221;28px&#8221; header_2_text_color=&#8221;#430C0D&#8221; header_2_font_size=&#8221;28px&#8221; header_3_text_color=&#8221;#430C0D&#8221; header_3_font_size=&#8221;28px&#8221; header_3_line_height=&#8221;1.3em&#8221; body_link_text_align=&#8221;left&#8221; custom_margin=&#8221;||0px||false|false&#8221; hover_enabled=&#8221;0&#8243; saved_tabs=&#8221;all&#8221; locked=&#8221;off&#8221; global_colors_info=&#8221;{}&#8221; tabs_min_width_last_edited=&#8221;on|phone&#8221; tabs_item_bg_enable_color__hover=&#8221;on&#8221; tabs_item_bg_enable_color_phone=&#8221;on&#8221; tabs_item_active_bg_enable_color_phone=&#8221;on&#8221; tabs_active_item_padding__hover_enabled=&#8221;off|hover&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243;][dipi_advanced_tabs_item title=&#8221;Description&#8221; use_library_content=&#8221;on&#8221; divi_library=&#8221;25984690&#8243; admin_label=&#8221;Description&#8221; icon_color=&#8221;rgba(21,2,42,0.3)&#8221; icon_color_active=&#8221;#B42124&#8243; tab_media=&#8221;icon&#8221; font_icon=&#8221;\ue610||divi||400&#8243; font_icon_active=&#8221;\uf2bd||fa||400&#8243; tab_icon_placement=&#8221;top&#8221; tab_icon_placement_phone=&#8221;top&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; text_font=&#8221;Inter|300|||||||&#8221; text_text_align=&#8221;center&#8221; text_text_color=&#8221;#430C0D&#8221; text_line_height=&#8221;1.9em&#8221; header_3_text_color=&#8221;#430C0D&#8221; header_3_font_size=&#8221;28px&#8221; custom_margin=&#8221;||0px||false|false&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243;]Lorem ipsum dolor sit amet, consectetur adipiscing elit. Quisque velit nisi, pretium ut lacinia in, elementum id enim. Quisque velit nisi, pretium ut lacinia in, elementum id enim.Proin eget tortor risus. Vestibulum ac diam sit amet quam vehicula elementum sed sit amet dui.<br \/>\n[\/dipi_advanced_tabs_item][dipi_advanced_tabs_item title=&#8221;Sp\u00e9cifications&#8221; use_library_content=&#8221;on&#8221; divi_library=&#8221;25984695&#8243; admin_label=&#8221;Sp\u00e9cifications&#8221; img_placement=&#8221;row&#8221; icon_color=&#8221;rgba(21,2,42,0.3)&#8221; icon_color_active=&#8221;#B42124&#8243; tab_media=&#8221;icon&#8221; font_icon=&#8221;Z||divi||400&#8243; font_icon_active=&#8221;\uf2bd||fa||400&#8243; tab_icon_placement=&#8221;top&#8221; tab_icon_placement_phone=&#8221;top&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; text_font=&#8221;Inter|300|||||||&#8221; text_text_align=&#8221;left&#8221; text_text_color=&#8221;#430C0D&#8221; text_line_height=&#8221;1.9em&#8221; header_3_text_color=&#8221;#430C0D&#8221; header_3_font_size=&#8221;28px&#8221; custom_margin=&#8221;||0px||false|false&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243;]<div class=\"wp-block-button\">\n<a  data-e-Disable-Page-Transition=\"true\" class=\"dlm-download-link dlm-download-default wp-block-button__link wp-element-button\" title=\"\" href=\"https:\/\/eden-instruments.com\/en\/telechargement\/25980136\/?tmstv=1789226599\" rel=\"nofollow\" id=\"download-link-25980136\" data-redirect=\"false\" >\n\tCompatibilit\u00e9 chimique de Pos\u00e9idon\t(1072 downloads\t)\n<\/a>\n<\/div>\n<br \/>\n<div class=\"wp-block-button\">\n<a  data-e-Disable-Page-Transition=\"true\" class=\"dlm-download-link dlm-download-default wp-block-button__link wp-element-button\" title=\"\" href=\"https:\/\/eden-instruments.com\/en\/telechargement\/25980139\/?tmstv=1789226599\" rel=\"nofollow\" id=\"download-link-25980139\" data-redirect=\"false\" >\n\tTableau de sp\u00e9cifications\t(1138 downloads\t)\n<\/a>\n<\/div>\n<br \/>\n[\/dipi_advanced_tabs_item][dipi_advanced_tabs_item title=&#8221;T\u00e9l\u00e9chargements&#8221; admin_label=&#8221;T\u00e9l\u00e9chargements&#8221; img_placement=&#8221;row&#8221; content_image_align=&#8221;start&#8221; icon_color=&#8221;rgba(21,2,42,0.3)&#8221; icon_color_active=&#8221;#B42124&#8243; tab_media=&#8221;icon&#8221; font_icon=&#8221;\uf1c1||fa||400&#8243; font_icon_active=&#8221;g||divi||400&#8243; tab_icon_placement=&#8221;top&#8221; _builder_version=&#8221;4.27.7&#8243; _module_preset=&#8221;default&#8221; text_text_align=&#8221;left&#8221; text_text_color=&#8221;#15022A&#8221; text_line_height=&#8221;1.9em&#8221; header_3_font_size=&#8221;19px&#8221; custom_margin=&#8221;||0px||false|false&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; theme_builder_area=&#8221;post_content&#8221; sticky_enabled=&#8221;0&#8243;]<\/p>\n<h3>DOWNLOAD CMP TRIBO DOCUMENTS<\/h3>\n<p>&nbsp;<\/p>\n<p>[\/dipi_advanced_tabs_item][\/dipi_advanced_tabs][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>CMP TriboThe Logitech CMP Tribo is a bench-top chemical mechanical polishing (CMP) system designed with the research of wafer processes in mind, including their associated wafer, pad and slurry interactions. Primary application areas for the CMP Tribo are in the field of CMP planarization or delayering, with secondary application in the field of Tribological science [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":25984642,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"<p>[et_pb_section fb_built=\"1\" _builder_version=\"4.24.3\" _module_preset=\"default\" width=\"100%\" custom_margin=\"0px||0px||false|false\" custom_padding=\"0px||0px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][et_pb_row column_structure=\"3_5,2_5\" use_custom_gutter=\"on\" gutter_width=\"4\" make_equal=\"on\" _builder_version=\"4.24.3\" _module_preset=\"default\" width=\"100%\" max_width=\"100%\" custom_margin=\"0px||||false|false\" custom_padding=\"0px||75px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][et_pb_column type=\"3_5\" _builder_version=\"4.24.3\" _module_preset=\"default\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][et_pb_text _builder_version=\"4.27.7\" _module_preset=\"default\" locked=\"off\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"]<\/p><h2>CMP Tripo<\/h2><p>[\/et_pb_text][et_pb_divider color=\"#D72B2F\" divider_weight=\"3px\" admin_label=\"S\u00e9parateur\" _builder_version=\"4.27.7\" _module_preset=\"default\" width=\"10%\" custom_margin=\"||0px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][\/et_pb_divider][et_pb_text _builder_version=\"4.27.7\" _module_preset=\"default\" locked=\"off\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"]<\/p><p>Le syst\u00e8me Logitech CMP Tribo est un syst\u00e8me de polissage chimico\u00adm\u00e9canique (CMP) de table con\u00e7u pour l'\u00e9tude des proc\u00e9d\u00e9s de fabrication de plaquettes, notamment les interactions entre la plaquette, le tampon et la suspension abrasive. Ses principaux domaines d'application sont la planarisation et le d\u00e9laminage par CMP, et secondairement la tribologie.<\/p><p>[\/et_pb_text][\/et_pb_column][et_pb_column type=\"2_5\" _builder_version=\"4.24.3\" _module_preset=\"default\" custom_css_main_element=\"margin: auto;\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][et_pb_image src=\"https:\/\/eden-instruments.com\/wp-content\/uploads\/2026\/08\/CMP-Tribo.png\" title_text=\"CMP Tribo\" _builder_version=\"4.27.7\" _module_preset=\"default\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][\/et_pb_image][\/et_pb_column][\/et_pb_row][et_pb_row _builder_version=\"4.25.0\" _module_preset=\"default\" width=\"100%\" max_width=\"100%\" locked=\"off\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][et_pb_column type=\"4_4\" _builder_version=\"4.24.3\" _module_preset=\"default\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"][dipi_advanced_tabs tabs_min_width_tablet=\"\" use_tabs_fullwidth_phone=\"on\" tabs_min_width_phone=\"100%\" tabs_placement_phone=\"column\" navigation_size=\"30\" navigation_padding=\"30\" admin_label=\"T\u00e9l\u00e9chargements\" _builder_version=\"4.27.7\" _module_preset=\"default\" header_text_color=\"#430C0D\" header_font_size=\"28px\" header_2_text_color=\"#430C0D\" header_2_font_size=\"28px\" header_3_text_color=\"#430C0D\" header_3_font_size=\"28px\" header_3_line_height=\"1.3em\" body_link_text_align=\"left\" custom_margin=\"||0px||false|false\" hover_enabled=\"0\" global_module=\"22989272\" saved_tabs=\"all\" locked=\"off\" global_colors_info=\"{}\" tabs_min_width_last_edited=\"on|phone\" tabs_item_bg_enable_color__hover=\"on\" tabs_item_bg_enable_color_phone=\"on\" tabs_item_active_bg_enable_color_phone=\"on\" tabs_active_item_padding__hover_enabled=\"off|hover\" theme_builder_area=\"post_content\" sticky_enabled=\"0\"][dipi_advanced_tabs_item title=\"Description\" use_library_content=\"on\" divi_library=\"25984408\" admin_label=\"Description\" icon_color=\"rgba(21,2,42,0.3)\" icon_color_active=\"#B42124\" tab_media=\"icon\" font_icon=\"\ue610||divi||400\" font_icon_active=\"\uf2bd||fa||400\" tab_icon_placement=\"top\" tab_icon_placement_phone=\"top\" _builder_version=\"4.27.7\" _module_preset=\"default\" text_font=\"Inter|300|||||||\" text_text_align=\"center\" text_text_color=\"#430C0D\" text_line_height=\"1.9em\" header_3_text_color=\"#430C0D\" header_3_font_size=\"28px\" custom_margin=\"||0px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"]<\/p><p>Lorem ipsum dolor sit amet, consectetur adipiscing elit. Quisque velit nisi, pretium ut lacinia in, elementum id enim. Quisque velit nisi, pretium ut lacinia in, elementum id enim.Proin eget tortor risus. Vestibulum ac diam sit amet quam vehicula elementum sed sit amet dui.<\/p><p>[\/dipi_advanced_tabs_item][dipi_advanced_tabs_item title=\"Sp\u00e9cifications\" use_library_content=\"on\" divi_library=\"25984412\" admin_label=\"Sp\u00e9cifications\" img_placement=\"row\" icon_color=\"rgba(21,2,42,0.3)\" icon_color_active=\"#B42124\" tab_media=\"icon\" font_icon=\"Z||divi||400\" font_icon_active=\"\uf2bd||fa||400\" tab_icon_placement=\"top\" tab_icon_placement_phone=\"top\" _builder_version=\"4.27.7\" _module_preset=\"default\" text_font=\"Inter|300|||||||\" text_text_align=\"left\" text_text_color=\"#430C0D\" text_line_height=\"1.9em\" header_3_text_color=\"#430C0D\" header_3_font_size=\"28px\" custom_margin=\"||0px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"]<\/p><p>[download id='25980136']<br \/>[download id='25980139']<\/p><p>[\/dipi_advanced_tabs_item][dipi_advanced_tabs_item title=\"T\u00e9l\u00e9chargements\" admin_label=\"T\u00e9l\u00e9chargements\" img_placement=\"row\" content_image_align=\"start\" icon_color=\"rgba(21,2,42,0.3)\" icon_color_active=\"#B42124\" tab_media=\"icon\" font_icon=\"\uf1c1||fa||400\" font_icon_active=\"g||divi||400\" tab_icon_placement=\"top\" _builder_version=\"4.27.7\" _module_preset=\"default\" text_text_align=\"left\" text_text_color=\"#15022A\" text_line_height=\"1.9em\" header_3_font_size=\"19px\" custom_margin=\"||0px||false|false\" global_colors_info=\"{}\" theme_builder_area=\"post_content\"]<\/p><h3>T\u00c9L\u00c9CHARGEZ LES DOCUMENTS DE CMP TORPI<\/h3><p>\u00a0<\/p><p>[\/dipi_advanced_tabs_item][\/dipi_advanced_tabs][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>","_et_gb_content_width":"","footnotes":""},"dipi_cpt_category":[],"class_list":["post-25984685","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/pages\/25984685","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/comments?post=25984685"}],"version-history":[{"count":5,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/pages\/25984685\/revisions"}],"predecessor-version":[{"id":25984702,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/pages\/25984685\/revisions\/25984702"}],"up":[{"embeddable":true,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/pages\/25984642"}],"wp:attachment":[{"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/media?parent=25984685"}],"wp:term":[{"taxonomy":"dipi_cpt_category","embeddable":true,"href":"https:\/\/eden-instruments.com\/en\/wp-json\/wp\/v2\/dipi_cpt_category?post=25984685"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}